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Clean Room Heating & Drying Ovens


The speedy development in many fields of the industry such as microstructure technology, electronics, genetic engineering and biotechnology demands an extension of production facilities under cleanworking conditions. Production under clean conditions improves the standard of quality in research, development and production.

Heating and drying processes, such as during the production of integrated circuits, under the highest possible degree of cleanliness are a precondition for a low failure rate thus helping to return profitable results.
 

Many of our VTF Clean Room Heating and Drying Ovens have been developed in close co-operation with leading corporations in the Semiconductor Industry. This co-operation has resulted in products which fulfill even the highest demands in the field of clean-room technology.

 

The solution

 

The VTF Clean Room Heating and Drying Ovens are available in a total of 7 sizes with workspace volumes between 60 l and 3,125 l and with nominal temperatures of 230 °C, 300 °C and 350 °C. The laminar flow technique creates a laminar, low-turbulence state of flow with a particularly homogeneous distribution of temperature thus ensuring optimum, reproducible production results. High-efficiency particulate air filters (HEPA) in the fresh and circulating air ducts ensure that the workspace is granted the clean room class 100 (according to US Federal Standard 209).


With obvious advantages:

  • Optimum production results on account of the highest possible cleanliness corresponding to clean room class 100 in the work space
  • High process temperatures of up to 350 °C under clean room conditions throughout the entire program cycle
  • Homogeneous, spatial temperature distribution throughout the entire temperature range
  • Shortened process cycles on account of short regeneration periods
  • Outer casing sealed for installation in clean room areas
  • Solutions for the integration into automated production lines also as clean room tunnel systems

For heat treatment of material used by the Aerospace and Defence Industry, we offer the appropriate ovens which fulfil the requirements of the standard AMS 2750 D.

  • Stainless steel workspace (1.4301) executed without joint
  • Outer casing coated
  • Operating and control system integrated into the outer casing
  • Mincon 32 operating and control system, entering of parameters and monitoring of the program over the touch panel
  • High-efficiency particulate air filters (HEPA) used for filtering circulating air
  • Differential pressure filter display
  • Filter test nozzle
  • Push-through design (as gate between the clean room and the grey area)
  • Outer casing in stainless steel (1.4301), polished (grain 180)
  • Outer casing sealed for installation in clean room
  • Outer casing with wall frame for flush mounting
  • Supply air filter (fine filter and high-efficiency particulate air filter F5, F7, H13)
  • Charging trolley/ancillary trolley
  • Vötsch software package (allows up to 32 systems to be networked)
  • This version of the device also available in clean room class 10,000

For product specifications please refer to the PDF Brochure